[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Prevention of Temperature-Induced Dewetting of Implanted SOI via Heated Ion Implantation
Borrel, Julien, Gauthier, Alexis, Deprat, Fabien, Lu, Vincent, Abbate, Francesco, Joblot, Sylvain, Clement, Laurent-Renaud, Tupin, Heloise, Zou, Wei, Arevalo, Edwin, Chevalier, Pascal, Dutartre, DidieYear:
2018
Language:
english
DOI:
10.1109/IIT.2018.8807965
File:
PDF, 524 KB
english, 2018