Effects of Tantalum Doping on Electrical Characteristics of High-Mobility Zinc Oxynitride Thin-Film Transistors
Tsuji, Hiroshi, Takei, Tatsuya, Nakata, Mitsuru, Miyakawa, Masashi, Fujisaki, YoshihideVolume:
40
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2019.2930062
Date:
September, 2019
File:
PDF, 650 KB
english, 2019