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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - On-Chip Precision Residual Strain Diagnostic Based on Gap-Dependent Electrical Stiffness
Ozgurluk, Alper, Nguyen, Clark T.-C.Year:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808299
File:
PDF, 4.68 MB
english, 2019