![](/img/cover-not-exists.png)
[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Automatic Fault Detection in Rails of Overhead Transport Systems for Semiconductor Fabs
Zhakov, Artem, Zhu, Hailong, Siegel, Armin, Rank, Sebastian, Schmidt, Thorsten, Fienhold, Lars, Hummel, StephanYear:
2019
Language:
english
DOI:
10.1109/asmc.2019.8791756
File:
PDF, 1.39 MB
english, 2019