[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Inline Inspection Improvement using Machine Learning on Broadband Plasma Inspector in an Advanced Foundry Fab
Guo, SM, Liu, JX, Navalakhe, Rupesh, Lee, Andy, Tsai, Brian, Lin, Mahatma, Plihal, Martin, Zhou, JianyunYear:
2019
Language:
english
DOI:
10.1109/asmc.2019.8791796
File:
PDF, 1.41 MB
english, 2019