![](/img/cover-not-exists.png)
[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Implant Optimization for a 180nm BCD Technology
Greenwood, B., Kimball, J., Sridaran, S., Truong, K., Lee, A., Menon, S., Gambino, J.P., Jastrzebski, L., Nadudvari, G., Roszol, L., Nagy, M., Molnar, G., Kiss, Z., Pongracz, A., Byrnes, J.Year:
2019
Language:
english
DOI:
10.1109/asmc.2019.8791817
File:
PDF, 2.57 MB
english, 2019