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[IEEE 2019 International Vacuum Electronics Conference (IVEC) - Busan, Korea (South) (2019.4.28-2019.5.1)] 2019 International Vacuum Electronics Conference (IVEC) - A microwave plasma jet chemical vapor deposition for diamond film growth
Lin, Chun-Yu, Yen, Jing-Shyang, Hsu, Hua-Yi, Lin, Ming-ChiehYear:
2019
Language:
english
DOI:
10.1109/ivec.2019.8744988
File:
PDF, 1.92 MB
english, 2019