[IEEE 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO) - Cork, Ireland (2018.7.23-2018.7.26)] 2018 IEEE 18th International Conference on Nanotechnology (IEEE-NANO) - Micromirror Angle Dependence with Etchant Choice on Silicon Via Wet Etching
Al-Hafidh, M., Wilson, R., Glidle, A., Reboud, J., Kelly, A., Cooper, J.M.Year:
2018
Language:
english
DOI:
10.1109/nano.2018.8626355
File:
PDF, 678 KB
english, 2018