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Spatially Resolved Spectroscopic Extreme Ultraviolet Reflectometry for Laboratory Applications
Tryus, Maksym, Herbert, Stefan, Wilson, Daniel, Bahrenberg, Lukas, Danylyuk, Serhiy, Juschkin, LarissaVolume:
19
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2019.16470
Date:
January, 2019
File:
PDF, 9.12 MB
english, 2019