Highly precise Ti/Pt/Cr/Au thin-film temperature sensor...

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Highly precise Ti/Pt/Cr/Au thin-film temperature sensor embedded in a microfluidic device

Wang, Jie-Jun, Wang, Tao, Wu, Chuan-Gui, Luo, Wen-Bo, Shuai, Yao, Zhang, Wang-Li
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Language:
english
Journal:
Rare Metals
DOI:
10.1007/s12598-019-01301-7
Date:
August, 2019
File:
PDF, 3.61 MB
english, 2019
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