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High performance In 0.83 Ga 0.17 As SWIR photodiode passivated by Al 2 O 3 /SiN x stacks with low-stress SiN x films
Wan, Luhong, Cao, Gaoqi, Shao, Xiumei, Deng, Shuangyan, Cheng, Jifeng, Gu, Yi, Li, XueVolume:
126
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5090393
Date:
July, 2019
File:
PDF, 2.87 MB
english, 2019