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[IEEE 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore (2018.4.22-2018.4.26)] 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Patterned Al-Ge Wafer Bonding for Reducing In-Process Side Leakage of Eutectic
Gao, Kai, Zhang, Qiyuan, Su, Weiguo, Zhang, WeiYear:
2018
Language:
english
DOI:
10.1109/NEMS.2018.8556904
File:
PDF, 920 KB
english, 2018