[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - AC Reliability of Integrated Low-Temperature PVD PZT Films
Diniz Reis, Daniel Monteiro, Rzepka, Sven, Hiller, KarlaYear:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808421
File:
PDF, 2.38 MB
english, 2019