[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Fabrication and Integration of Binary Phased Fresnel Lens and Micro Linear Actuator for IR Laser Beam Scanning Application
Lu, Hsueh-Yu, Lu, Chi-En, Huang, Zi-Rong, Lin, Shihwei, Lo, Sung-Cheng, Chen, Rongshun, Fang, WeileunYear:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808625
File:
PDF, 351 KB
english, 2019