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[IEEE 2019 42nd International Spring Seminar on Electronics Technology (ISSE) - Wroclaw, Poland (2019.5.15-2019.5.19)] 2019 42nd International Spring Seminar on Electronics Technology (ISSE) - Development of HfO 2 /Al 2 O 3 Stack for On-Chip Capacitor Applications
Hrdy, Radim, Prasek, Jan, Fillner, Patrik, Vancik, Silvestr, Schneider, Michael, Hubalek, Jaromir, Schmid, UlrichYear:
2019
Language:
english
DOI:
10.1109/ISSE.2019.8810156
File:
PDF, 1.37 MB
english, 2019