Influence of nitrogen ion species on mass-selected low...

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Applied Surface Science 2019 / 9

Influence of nitrogen ion species on mass-selected low energy ion-assisted growth of epitaxial GaN thin films

Mensing, Michael, Schumacher, Philipp, Gerlach, Jürgen W., Herath, Sören, Lotnyk, Andriy, Rauschenbach, Bernd
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Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.143830
Date:
September, 2019
File:
PDF, 38.28 MB
english, 2019
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