Combination of an atmospheric pressured arc reactor and a...

Thin Solid Films 2019 / 11 Vol. 689

Combination of an atmospheric pressured arc reactor and a magnetron sputter device for the synthesis of novel nanostructured thin films

Tillmann, Wolfgang, Kokalj, David, Stangier, Dominic, Fu, Qingqing, Kruis, Einar
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Volume:
689
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.137528
Date:
November, 2019
File:
PDF, 3.20 MB
english, 2019
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