Investigation of the properties of a 3-level broadband antireflective structure on silicon by THz time-domain spectroscopy
Tzibizov, I.A., Kropotov, G.I., Pavelyev, V.S., Tukmakov, K.N., Reshetnikov, A.S., Silaev, A.A.Volume:
195
Year:
2018
Language:
english
Journal:
EPJ Web of Conferences
DOI:
10.1051/epjconf/201819506016
File:
PDF, 202 KB
english, 2018