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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Creation of Quantum Centers in Silicon using Spatial Selective Ion Implantation of high Lateral Resolution
Herzig, Tobias, Racke, Paul, Raatz, Nicole, Spemann, Daniel, Redjem, Walid, Gerlach, Jurgen W., Meijer, Jan, Cassabois, Guillaume, Abbarchi, Marco, Pezzagna, SebastienYear:
2018
Language:
english
DOI:
10.1109/iit.2018.8807909
File:
PDF, 5.18 MB
english, 2018