Fabrication of Micro- and Nanopillars from Pyrolytic Carbon...

Micromachines 2019 / 07 Vol. 10; Iss. 8

Fabrication of Micro- and Nanopillars from Pyrolytic Carbon and Tetrahedral Amorphous Carbon

Heikkinen, Joonas J., Peltola, Emilia, Wester, Niklas, Koskinen, Jari, Laurila, Tomi, Franssila, Sami, Jokinen, Ville
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Volume:
10
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi10080510
Date:
July, 2019
File:
PDF, 25.97 MB
english, 2019
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