Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
2019 / 7 Vol. 13; Iss. 4
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Optimization of the Electron Optical System of a Scanning Electron Microscope for Measuring the Size of Micro- and Nanoobjects
Kazmiruk, V. V., Kurganov, I. G., Podkopaev, A. A., Savitskaya, T. N.Volume:
13
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451019040074
Date:
July, 2019
File:
PDF, 1.18 MB
english, 2019