The Formation Mechanism of Nondefective Silicon Micropatterns Fabricated by Scratching Assisted Electrochemical Etching
Peng, Yong, Jiang, Shulan, Tan, Yong, Wang, Hongbo, Wu, Lei, Qian, LinmaoVolume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0101909jss
File:
PDF, 1.98 MB
english, 2019