[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Yield Learning for Complex FinFET Defect Mechanisms Based on Volume Scan Diagnosis Results
Tang, Huaxing, Sharma, Manish, Cheng, Wu-Tung, Veda, Gaurav, Gehringer, Douglas, Knowles, Matt, D'Souza, Jayant, Sekar, Kannan, Bawaskar, Neerja, Pan, YanYear:
2019
Language:
english
DOI:
10.1109/asmc.2019.8791755
File:
PDF, 1.22 MB
english, 2019