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[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Distinguishing between electron-beam signals in probing of SRAM modules for yield management
Johnson, Gregory M., Niu, Baohua, Lundquist, Ted, Rummel, Andreas, Kemmler, MatthiasYear:
2019
Language:
english
DOI:
10.1109/asmc.2019.8791824
File:
PDF, 3.46 MB
english, 2019