Effect of Chloride Ions on the Chemical Mechanical...

ECS Journal of Solid State Science and Technology 2019 Vol. 8; Iss. 9

Effect of Chloride Ions on the Chemical Mechanical Planarization Efficiency of Sapphire Substrate

Cui, Yaqi, Niu, XinHuan, Zhou, Jiakai, Wang, Zhi, Wang, Ru, Zhang, Jin
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Volume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0161909jss
File:
PDF, 1.18 MB
english, 2019
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