Comparison of gas permeable mold with acryl substituents...

Microelectronic Engineering 2019 / 08 Vol. 216

Comparison of gas permeable mold with acryl substituents for silver nano-paste imprint patterning

Kurematsu, Kazuho, Takei, Satoshi, Nakajima, Shinya, Mizui, Kento, Takamatsu, Soichiro, Hirata, Daiki, Hanabata, Makoto
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Volume:
216
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111085
Date:
August, 2019
File:
PDF, 1.18 MB
english, 2019
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