[IEEE 2019 20th International Conference on Solid-State...

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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Two-Dimensional Curving Techniques from Flat Diffraction Grating to Concave Diffraction Grating

Aono, Takanori, Ebata, Yoshisada, Yaegashi, Kenta, Matsui, Shigeru
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Year:
2019
Language:
english
DOI:
10.1109/transducers.2019.8808720
File:
PDF, 901 KB
english, 2019
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