Plasma-Chemical Deposition of Diamond-Like Films onto the...

Semiconductors 2019 / 9 Vol. 53; Iss. 9

Plasma-Chemical Deposition of Diamond-Like Films onto the Surface of Heavily Doped Single-Crystal Diamond

Okhapkin, A. I., Yunin, P. A., Drozdov, M. N., Korolyov, S. A., Kraev, S. A., Arkhipova, E. A., Skorokhodov, E. V., Bushuykin, P. A., Shashkin, V. I.
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Volume:
53
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S1063782619090136
Date:
September, 2019
File:
PDF, 434 KB
english, 2019
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