Raman Spectroscopy Characterization of Ion Implanted 4H-SiC

Materials Science Forum 2019 / 7 Vol. 963

Raman Spectroscopy Characterization of Ion Implanted 4H-SiC

Xu, Zong Wei, Song, Y., Rommel, Mathias, Liu, T., Kocher, Matthias, He, Z.D., Wang, H., Yao, B.T., Liu, L., Fang, Feng Zhou
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Volume:
963
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.963.424
Date:
July, 2019
File:
PDF, 1.54 MB
english, 2019
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