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Characterization of TiN Oxide Doping Antimony Thin Layer with Sol- Gel Spin Coating Method for Electronic Device
Doyan, Aris, Susilawati,, Harjono, Ahmad, Azzahra, Syifa, Taufik, MuhammadVolume:
966
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.966.30
Date:
August, 2019
File:
PDF, 907 KB
english, 2019