Reprint of: Sterilization of small vial using electron...

Reprint of: Sterilization of small vial using electron cyclotron resonance plasma

Nishikawa, Tatsuya, Abe, Norihito, Yonesu, Akira, Hayashi, Nobuya
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Volume:
167
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.03.044
Date:
September, 2019
File:
PDF, 1.08 MB
english, 2019
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