Reprint of: Sterilization of small vial using electron cyclotron resonance plasma
Nishikawa, Tatsuya, Abe, Norihito, Yonesu, Akira, Hayashi, NobuyaVolume:
167
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.03.044
Date:
September, 2019
File:
PDF, 1.08 MB
english, 2019