[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Characterization Techniques for Ion-Implanted Layers in Silicon
Polignano, Maria Luisa, Codegoni, Davide, Galbiati, Amos, Grasso, Salvatore, Mica, Isabella, Basa, Peter, Pongracz, Anita, Kiss, Zoltan Tamas, Nadudvari, GyorgyYear:
2018
Language:
english
DOI:
10.1109/IIT.2018.8807895
File:
PDF, 954 KB
english, 2018