[IEEE 2018 22nd International Conference on Ion...

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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Characterization Techniques for Ion-Implanted Layers in Silicon

Polignano, Maria Luisa, Codegoni, Davide, Galbiati, Amos, Grasso, Salvatore, Mica, Isabella, Basa, Peter, Pongracz, Anita, Kiss, Zoltan Tamas, Nadudvari, Gyorgy
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Year:
2018
Language:
english
DOI:
10.1109/IIT.2018.8807895
File:
PDF, 954 KB
english, 2018
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