[IEEE 2019 20th International Conference on Solid-State...

[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Industrial-Grade Fabrication of Nanowire Sensor Device Exploiting Sacrificial Shadow Patterning Method

Jo, Min-Seung, Seo, Min-Ho, Choi, Kwang-Wook, Lee, Jae-Shin, Yoo, Jae-Young, Song, Hyeon-Joo, Yoon, Jun-Bo

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Year:

2019

Language:

english

DOI:

10.1109/TRANSDUCERS.2019.8808455

File:

PDF, 1.61 MB

english, 2019

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