[IEEE 2019 20th International Conference on Solid-State...

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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - A Solidly Mounted Resonator With CMOS-Fabricated Acoustic Mirror For Low-Cost Air Quality Monitoring

Villa Lopez, Farah H., Cole, Marina, Iborra, Enrique, Ramos, Mario De-Miguel, Gardner, Julian W.
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Year:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808790
File:
PDF, 1.08 MB
english, 2019
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