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[IEEE 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2019.5.6-2019.5.9)] 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Fluorine Saturated Yttrium (YF) Based Coatings for Advanced Semiconductor ULSI Manufacturing
Padron-Wells, Gabriel, VanOverloop, Michael, Yeo, Junghyeon, Abit, Avun, Finneran, Kevin, Mclaughlin, Lenore, Greuter, RyanYear:
2019
Language:
english
DOI:
10.1109/asmc.2019.8791799
File:
PDF, 1.43 MB
english, 2019