Development of a megasonic cleaner for TFT LCD...

Development of a megasonic cleaner for TFT LCD manufacturing

Kim, Hie-Sik, Choi, Gi Sang
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Volume:
18
Language:
english
Journal:
International Journal of Applied Electromagnetics and Mechanics
DOI:
10.3233/JAE-2003-273
Date:
October, 2003
File:
PDF, 248 KB
english, 2003
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