Study on nucleation and propagation of median cracks...

Materials Science in Semiconductor Processing 2020 / 01 Vol. 105

Study on nucleation and propagation of median cracks generated by scratching single crystal silicon

Yao, Longxu, Zhang, Lei, Ge, Peiqi, Gao, Yufei, Wang, Hui
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Volume:
105
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.104691
Date:
January, 2020
File:
PDF, 3.25 MB
english, 2020
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