Atomistic simulation of influence of laser nano-structured diamond abrasive on the polishing behavior of silicon
Dai, Houfu, Zhou, Yuqi, Zhang, FaVolume:
105
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2019.104706
Date:
January, 2020
File:
PDF, 13.88 MB
english, 2020