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[IEEE 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Singapore, Singapore (2019.3.12-2019.3.15)] 2019 Electron Devices Technology and Manufacturing Conference (EDTM) - Influence of post-deposition annealing on interface characteristics at Al 2 O 3 /n-GaN
Yuge, Kazuya, Nabatame, Toshihide, Irokawa, Yoshihiro, Ohi, Akihiko, Ikeda, Naoki, Uedono, Akira, Sang, Liwen, Koide, Yasuo, Ohishi, TomojiYear:
2019
Language:
english
DOI:
10.1109/edtm.2019.8731166
File:
PDF, 271 KB
english, 2019