[IEEE 2019 20th International Conference on Solid-State...

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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Small Size And Highly Sensitive Differential MEMS Accelerometer Based On Double-Ended Tuning Fork Resonators

Moreira, Eurico E., Kuhlmann, Burkhard, Gaspar, Joao, Rocha, Luis A.
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Year:
2019
Language:
english
DOI:
10.1109/TRANSDUCERS.2019.8808174
File:
PDF, 2.68 MB
english, 2019
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