Plasma assisted formation of 3D highly porous nanostructured metal oxide network on microheater platform for Low power gas sensing
Long, Hu, Turner, Sally, Yan, Aiming, Xu, Hongmei, Jang, Moonsuk, Carraro, Carlo, Maboudian, Roya, Zettl, AlexVolume:
301
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2019.127067
Date:
December, 2019
File:
PDF, 2.31 MB
english, 2019