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[IEEE 2019 IEEE International Conference on Mechatronics (ICM) - Ilmenau, Germany (2019.3.18-2019.3.20)] 2019 IEEE International Conference on Mechatronics (ICM) - Active Cantilevers with Diamond-Tip for Field Emission Scanning Probe Lithography and Imaging
Hofmann, Martin, Mechold, Stephan, Holz, Mathias, Ahmad, Ahmad, Ivanonv, Tzvetan, Rangelow, Ivo W.Year:
2019
Language:
english
DOI:
10.1109/ICMECH.2019.8722885
File:
PDF, 1.28 MB
english, 2019