[IEEE 2018 22nd International Conference on Ion...

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[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Si and Mg Ion Implantation for Doping of GaN Grown on Silicon

Coig, M., Lardeau-Falcy, A., Sacher, N., Kanyandekwe, J., Huvelin, A., Biscarrat, J., Vilain, E., Milesi, F., Mazen, F.
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Year:
2018
Language:
english
DOI:
10.1109/IIT.2018.8807956
File:
PDF, 1.03 MB
english, 2018
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