[IEEE 2018 22nd International Conference on Ion Implantation Technology (IIT) - Würzburg, Germany (2018.9.16-2018.9.21)] 2018 22nd International Conference on Ion Implantation Technology (IIT) - Si and Mg Ion Implantation for Doping of GaN Grown on Silicon
Coig, M., Lardeau-Falcy, A., Sacher, N., Kanyandekwe, J., Huvelin, A., Biscarrat, J., Vilain, E., Milesi, F., Mazen, F.Year:
2018
Language:
english
DOI:
10.1109/IIT.2018.8807956
File:
PDF, 1.03 MB
english, 2018