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[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Micromachined Uncooled Si x Ge y O 1-x-y Microbolometer Integrated Metasurface for Uncooled Infrared Detection
Abdullah, Amjed, Koppula, Akshay, Alkorjia, Omar, Warder, Cameron, Liu, Tao, Kinzel, Edward, Almasri, MahmoudYear:
2019
Language:
english
DOI:
10.1109/transducers.2019.8808347
File:
PDF, 1.03 MB
english, 2019