Self-Annealing Behavior of Electroplated Cu in Blind-Hole Structures
Yang, Cheng-Hsien, Lee, Yu-Wei, Lee, Cheng-Yu, Chang, Chih-Hao, Ho, Cheng-EnVolume:
166
Year:
2019
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.1301913jes
File:
PDF, 1.53 MB
english, 2019