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Correlation between the formation of particle defects on sputtered Cu seed layers and Cu targets
Bian, Yi-Jun, Cha, Ming-Yang, Chen, Lin, Sun, Qing-Qing, Zhang, Wei, Ding, Shi-JinVolume:
14
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2019.0139
Date:
September, 2019
File:
PDF, 318 KB
english, 2019