Synthesis of Single-Layer ZrN-Coatings Using Vacuum-Arc Plasma-Assisted Deposition with Plasma Flow Filtering
Krysina, O. V., Shugurov, V. V., Prokopenko, N. A., Petrikova, E. A., Tolkachev, O. S., Denisova, Yu. A.Language:
english
Journal:
Russian Physics Journal
DOI:
10.1007/s11182-019-01786-w
Date:
September, 2019
File:
PDF, 638 KB
english, 2019