Nickel and copper electroplating of proton beam micromachined SU-8 resist
J. A. van Kan, I. Rajta, K. Ansari, A. A. Bettiol, F. WattVolume:
8
Language:
english
Pages:
4
DOI:
10.1007/s00542-001-0139-5
Date:
September, 2002
File:
PDF, 212 KB
english, 2002