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Application of UV depth lithography and 3D-microforming for high aspect ratio electromagnetic microactuator components
T. Kohlmeier, V. Seidemann, S. Büttgenbach, H. H. GatzenVolume:
8
Language:
english
Pages:
4
DOI:
10.1007/s00542-001-0154-6
Date:
August, 2002
File:
PDF, 168 KB
english, 2002