High aspect ratio microstructures based on anisotropic...

Microsystem Technologies 2002 / 03 Vol. 8; Iss. 1

High aspect ratio microstructures based on anisotropic porous materials

F. Müller, A. Birner, J. Schilling, A.-P. Li, K. Nielsch, U. Gösele, V. Lehmann
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Volume:
8
Language:
english
Pages:
3
DOI:
10.1007/s00542-002-0047-3
Date:
March, 2002
File:
PDF, 330 KB
english, 2002
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